Jiangsu MNT Micro and Nanotech Co., LTD

Product Detail
Single Chamber Type  (MNT-S)
Single Chamber Type  (MNT-S)
Product details

Single ChamberType  (MNT-S)

· Substrate size: 4-12 inch

· (Compatible with 156*156 mm, 200 *200 mm)

· Substrate Temperature: RT - 400 °C; ±1°C

· Vacuum Chamber: 316L stainless steel

· Precursor Delivery System:up to 6 lines

· DepositionModes: High speed, ultra-high aspect ratio and composite film

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