Jiangsu MNT Micro and Nanotech Co., LTD

Product Detail
Glovebox Integrated Type (MNT-G )
Glovebox Integrated Type (MNT-G )
Product details

GloveboxIntegrated Type (MNT-G )

· Substrate size: 4-8 inch · Substrate Temperature: RT - 400 °C;±1°C · Vacuum Chamber: 316L stainless steel · Precursor Delivery System: up to6 lines

·Deposition Modes: High speed, ultra-high aspect ratio and composite film

Log in
Log in
My Profile
leave a message
back to the top